Chinese submerged DUV lithography machines begin small-scale production, with plans to deliver five units in 2026.

ChainCatcher report, according to The Information, citing sources, an unnamed Shanghai state-backed company has begun producing domestic immersion DUV lithography machines, planning to manufacture approximately 5 units this year and ramping up to around 20 by 2027. The first units will be delivered to major wafer fabs such as SMIC, Hua Hong Semiconductor, and CXMT, but the equipment still requires validation for precision, stability, and production line compatibility—a process that may take several months or longer. While most components of the device are now domestically sourced, certain critical parts still rely on Japanese suppliers, and its performance and manufacturing quality remain behind ASML’s. For comparison, ASML delivered approximately 131 immersion DUV lithography machines in 2025 alone. Although the domestic equipment has progressed from prototype testing to small-scale production, it still lags significantly behind ASML in terms of large-scale replacement potential. Previously, Reuters reported that the U.S. is considering further tightening export controls on lithography equipment to China and restrictions on maintenance services within China; this domestic milestone coincides with that backdrop.